Substrate crosstalk reduction using SOI technology

Abstract

This work analyzes both by simulations and measurements the substrate crosstalk performances of various Silicon-On-Insulator (SOI) technologies, and compares them to those of normal bulk CMOS process. The influence of various parameters, such as substrate resistivity, buried oxide thickness and distance between devices, is investigated. The use of capacitive guard rings is proposed, and their effectiveness is demonstrated. A simple RC model has been developed to allow a deep understanding of these phenomena as well as to simplify future studies of more complex systems. The superiority of high-resistivity SIMOX substrates over standard SOI and bulk is finally demonstrated.