Substrate bombardment in rf sputtering systems

Gas Incorporation into Sputtered Films

Harold F. Winters, E. Kay · Journal of Applied Physics · 1967 · 233 citations

Natural Sciences, Materials Engineering, Materials Science +16

Dielectric Thin Films through rf Sputtering

P. D. Davidse, L. I. Maissel · Journal of Applied Physics · 1966 · 168 citations

Natural Sciences, Materials Science, Physics +16

Low-Energy (1- to 100-eV) Charge-Transfer Cross-Section Measurements for Noble-Gas-Ion Collisions with Gases

Priya Mahadevan, G. D. Magnuson · Physical Review · 1968 · 81 citations

Natural Sciences, Physics, Molecular Physics +10

The evaluation of thin film insulators

W. A. Pliskin · Thin Solid Films · 1968 · 54 citations

Natural Sciences, Materials Engineering, Materials Science +11

Re-emission Coefficients of Si and SiO2 Films Deposited through rf and dc Sputtering

Reese E. Jones, C. L. Standley, L. I. Maissel · Journal of Applied Physics · 1967 · 38 citations

Engineering, Materials Engineering, Materials Science +15