Concepedia
Sensors and Actuators A Physical · 2006 · 21 citations · 14 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesThin FilmsMems ResonatorsMicrowave FiltersCoupled-resonator FiltersMems Filter DesignMems FiltersMicromechanical OscillatorsPolysilicon
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High-Q HF microelectromechanical filters
F.D. Bannon, J.R. Clark, Clark T.‐C. Nguyen · IEEE Journal of Solid-State Circuits · 2000 · 457 citations
Engineering, Electrical Engineering, Mechanical Engineering +17
Micromachined devices for wireless communications
Clark T.‐C. Nguyen, L.P.B. Katehi, Gabriel M. Rebeiz · Proceedings of the IEEE · 1998 · 423 citations
Engineering, Communication, Electrical Engineering +17
VHF free-free beam high-Q micromechanical resonators
Kun Wang, Ark-Chew Wong, Clark T.‐C. Nguyen · Journal of Microelectromechanical Systems · 2000 · 364 citations
Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems
H.A.C. Tilmans · Journal of Micromechanics and Microengineering · 1996 · 352 citations
Engineering, Electrical Engineering, Mechanical Engineering +12
Equivalent circuit representation of electromechanical transducers: II. Distributed-parameter systems
H.A.C. Tilmans · Journal of Micromechanics and Microengineering · 1997 · 142 citations