Highly uniform and low-loss passive silicon photonics devices using a 300mm CMOS platform

Abstract

Using an advanced 300mm CMOS-platform, we report record-low and highly-uniform propagation loss: 0.45±0.12dB/cm for wires, and 2dB/cm for slot waveguides. For WDM devices, we demonstrate channel variation(3-σ) within-wafer and within-device of 6.1nm and 1.2nm respectively.