Materials Science and Engineering B · 2002 · 50 citations · 16 references
EngineeringMechanicsMechanical EngineeringApplied PhysicsEpitaxial Lift-off ProcessLateral Etch Rate
16
Extreme selectivity in the lift-off of epitaxial GaAs films
Eli Yablonovitch, T.J. Gmitter, J. P. Harbison et al. · Applied Physics Letters · 1987 · 801 citations · Full text
Materials Science, Wide-bandgap Semiconductor, Engineering +10