Silicon Suspended Resonant Grating Filters Fabricated From a Silicon-on-Insulator Wafer

Abstract

In this letter, a silicon suspended grating without a substrate is fabricated using micro- and nanolithography technologies. Experimental measurements reveal that it serves as a microoptical filter, which is due to guided mode resonance effect of the grating. Theoretical calculations by a rigorous coupled wave method prove to be in agreement with the experimental observations.