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Passivation mechanism of thermal atomic layer-deposited Al2O3 films on silicon at different annealing temperatures

DOIFull Paper Access

34

Citations

20

References

2013

Year

Yan Zhao, Chunlan Zhou, Xiang Zhang, Peng Zhang, Yanan Dou, Wenjing Wang, Xingzhong Cao, Baoyi Wang, Yehua Tang, Su Zhou
Nanoscale Research Letters

References

YearCitations

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