2002 · 12 citations · 14 references
EngineeringElectrical EngineeringManufacturing ProcessesMicroelectronicsMicrofabricationIntegrated Circuit DesignIntegrated Circuit FabricationMicrofabrication ProcessesInductor DesignInductorsPackaging Techniques
The precision MCM process described in this paper has several performance enhancing features not found in other reported MCM processes. The process enables the fabrication of inductors with orders of magnitude greater inductance than other packaging techniques for the same area on the MCM.
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Joachim N. Burghartz, D. Edelstein, K.A. Jenkiin et al. · IEEE Transactions on Microwave Theory and Techniques · 1997 · 141 citations