A wafer-scale 3-D circuit integration technology

J.A. Burns, Brian F. Aull, C.K. Chen, +7

IEEE Transactions on Electron Devices

3D Ic ArchitectureElectrical EngineeringWafer Scale ProcessingEngineeringWafer Bow +13

Megapixel CMOS image sensor fabricated in three-dimensional integrated circuit technology

Vyshnavi Suntharalingam, R. Berger, J.A. Burns, +15

Room TemperatureElectrical Engineering3D Ic ArchitectureEngineeringPhotoelectric Sensor +12

MEMS microswitches for reconfigurable microwave circuitry

S.M. Duffy, C. O. Bozler, S. Rabe, +5

IEEE Microwave and Wireless Components Letters

Electrical EngineeringEngineeringSeries CapacitanceMicromachinesMicrofabrication +8

MEMS microswitch arrays for reconfigurable distributed microwave components

C. O. Bozler, R. Drangmeister, S.M. Duffy, +6

Mems Microswitch ArraysMicrowave CircuitsElectrical EngineeringEngineeringMicrofabrication +11

Laser Radar Imager Based on 3D Integration of Geiger-Mode Avalanche Photodiodes with Two SOI Timing Circuit Layers

Brian F. Aull, J.A. Burns, C. Chen, +12

EngineeringGeiger-mode Avalanche PhotodiodesImage SensorLaser-based SensorInstrumentation +16

A 4-side tileable back illuminated 3D-integrated Mpixel CMOS image sensor

Vyshnavi Suntharalingam, R. Berger, Sheila Clark, +12

Image SensorPhotoelectric SensorImage AnalysisEngineeringTime-of-flight Camera +11

High-performance fully-depleted SOI RF CMOS

C.L. Chen, S. J. Spector, R. Blumgold, +10

IEEE Electron Device Letters

Low-power ElectronicsElectrical EngineeringEngineeringVlsi DesignStandard Cmos +10

Fabrication of three-dimensional mode converters for silicon-based integrated optics

M. Fritze, J.M. Knecht, C. O. Bozler, +9

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Optical MaterialsEngineeringSilicon Surface RoughnessOptoelectronic DevicesIntegrated Circuits +14

Wafer-scale 3D integration of InGaAs image sensors with Si readout circuits

C.L. Chen, D-R. Yost, J.M. Knecht, +12

EngineeringDevice IntegrationOptoelectronic DevicesIntegrated CircuitsSilicon On Insulator +19

High-frequency characterization of sub-0.25-/spl mu/m fully depleted silicon-on-insulator MOSFETs

C.L. Chen, R.H. Mathews, J.A. Burns, +8

IEEE Electron Device Letters

Fdsoi MosfetsElectrical EngineeringGate LengthEngineeringHigh-frequency Characterization +11