Laser Radar Imager Based on 3D Integration of Geiger-Mode Avalanche Photodiodes with Two SOI Timing Circuit Layers

Brian F. Aull, J.A. Burns, C. Chen, Bradley Felton, Hugo H. Hanson, C.L. Keast, J.M. Knecht, Andrew H. Loomis, Matthew J. Renzi, Anna Elis Paz Soares,

2006 · 56 citations · 2 references

Concepts

Abstract

A 64 X 64 laser-radar (ladar) detector array with 50mum pixel size measures the arrival times of single photons using Geiger-mode avalanche photodiodes (APD). A 3-tier structure with active devices on each tier is used with 227 transistors, six 3D vias and an APD in each pixel. A 9b pseudorandom counter in the pixel measures time. Initial imagery shows 2ns time quantization

References

2