Concepedia

MEMS microswitch arrays for reconfigurable distributed microwave components

C. O. Bozler, R. Drangmeister, S.M. Duffy, M.A. Gouker, J.M. Knecht, Lawrence J. Kushner, R. Parr, S. Rabe, L. Travis

2002 · 63 citations · 6 references

DOI

Concepts

Abstract

A novel MEMS switch design for use in microwave circuits is presented. The microswitch is capable of being configured in a multi-element X-Y array for use in tunable distributed circuits. Circuit design concepts using microswitch arrays and measurements of single microswitch performance are given.

References

6

RF MEMs variable capacitors for tunable filters

Charles L. Goldsmith, A. Malczewski, Zhimin Yao et al. · International Journal of RF and Microwave Computer-Aided Engineering · 1999 · 134 citations

, , +16

Surface-micromachined RF MEMs switches on GaAs substrates

Daniel Hyman, Juan E Lam, Brett Warneke et al. · International Journal of RF and Microwave Computer-Aided Engineering · 1999 · 108 citations

, , +16

Micromechanical electrostatic K-band switches

Sergio Pacheco, Clark T.‐C. Nguyen, L.P.B. Katehi · 2002 · 108 citations

, , +16

Microswitches and microrelays with a view toward microwave applications

P.M. Zavracky, N.E. McGruer, Richard H. Morrison et al. · International Journal of RF and Microwave Computer-Aided Engineering · 1999 · 95 citations

, , +11

GaAs-compatible surface-micromachined RF MEMS switches

Daniel Hyman, A. Schmitz, Brett Warneke et al. · Electronics Letters · 1999 · 83 citations

, , +16