Concepedia

Controlled glow to arc transition in sputtering for high rate deposition of carbon films

Martina Lattemann, Barbara Abendroth, A. Moafi, Dougal G. McCulloch, David R. McKenzie

Diamond and Related Materials · 2010 · 48 citations · 24 references

DOI

Concepts

References

24

Diamond-like amorphous carbon

John Robertson · Materials Science and Engineering R Reports · 2002 · 6.1K citations

<i>Electron Energy-Loss Spectroscopy in the Electron Microscope</i>

R.F. Egerton, Dale E. Newbury · Physics Today · 1987 · 3.4K citations

, , +11

Amorphous carbon

John Robertson · Advances In Physics · 1986 · 1.4K citations

, , +17

Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample, multi-wavelength, multi-angle investigation

Craig M. Herzinger, Blaine Johs, William A. McGahan et al. · Journal of Applied Physics · 1998 · 1.1K citations

, , +17

A novel pulsed magnetron sputter technique utilizing very high target power densities

V. Kouznetsov, K. Macák, Jochen M. Schneider et al. · Surface and Coatings Technology · 1999 · 1.1K citations

, , +7