Charge-Based Modeling of Junctionless Double-Gate Field-Effect Transistors

Abstract

We derived an analytical model for the junctionless double-gate metal-oxide-semiconductor field-effect transistor (DG MOSFET) device, the principle of which has been recently demonstrated. Despite some similarities with classical junction-based DG MOSFETs, the charge-potential relationships are quite different and cannot be merely mapped on existing multigate formalisms. This is particularly true for the technological parameters of interest where reported doping densities exceed 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">19</sup> cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-3</sup> for 10- and 20-nm silicon channel thicknesses. Assessment of the model with numerical simulations confirms its validity for all regions of operation, i.e., from deep depletion to accumulation and from linear to saturation.