Multiscale Modeling of Thin-Film Deposition: Applications to Si Device Processing

F.H. Baumann, David L. Chopp, T. Dı́az de la Rubia, George H. Gilmer, J. E. Greene, H. Huang, Suneel Kodambaka, Peter O'Sullivan, I. Petrov

MRS Bulletin · 2001 · 84 citations · 18 references

Concepts

References

18