MRS Bulletin · 2001 · 84 citations · 18 references
EngineeringMaterials EngineeringMaterials ScienceMultiscale ModelingSemiconductor DevicesThin FilmsDevice ModelingDevice SimulationMultiscale Materials ModelingSemiconductor Thin FilmsThin-film DepositionThin-film MaterialsDeposition Rate ControlFilm DepositionFilm Growth MechanismsSilicon Device SimulationThin Film Deposition MaterialsThin-film Growth KineticsThin-film Growth Mechanisms
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