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Gate-all-around silicon nanowire 25-stage CMOS ring oscillators with diameter down to 3 nm
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2010
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Low-power ElectronicsElectrical EngineeringAc Characterization ShowsEngineeringPhysicsHigh-frequency DeviceNanotechnologyNanoelectronicsCircuit SystemApplied PhysicsCylindrical CapacitorElectronic CircuitSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsSilicon NanowireSemiconductor DeviceGate-all-around Silicon
We demonstrate the world's first top-down CMOS ring oscillators (ROs) fabricated with gate-all-around (GAA) silicon nanowire (NW) FETs having diameters as small as 3 nm. NW capacitance shows size dependence in good agreement with that of a cylindrical capacitor. AC characterization shows enhanced self-heating below 5 nm.