Study of atomic layer epitaxy of zinc oxide by in-situ quartz crystal microgravimetry

<i>Piezoelectric Crystals and Their Applications to Ultrasonics</i>

W. P. Mason, H. G. Baerwald · Physics Today · 1951 · 934 citations

Natural Sciences, Materials Science, Physics +17

Atomic layer deposition of ZnO transparent conducting oxides

Akira Yamada, Baosheng Sang, Makoto Konagai · Applied Surface Science · 1997 · 243 citations

Natural Sciences, Materials Engineering, Materials Science +14

Synthesis of oxide thin films and overlayers by atomic layer epitaxy for advanced applications

Lauri Niinistö, Mikko Ritala, Markku Leskelä · Materials Science and Engineering B · 1996 · 139 citations

Natural Sciences, Materials Engineering, Materials Science +16

Monolayer thickness in atomic layer deposition

Markku Ylilammi · Thin Solid Films · 1996 · 138 citations

Natural Sciences, Materials Engineering, Materials Science +7

Electrochemical phase formation (ECPF) and macrogrowth Part I. Hemispherical models

S.K. Rangarajan · Journal of Electroanalytical Chemistry · 1982 · 135 citations

Natural Sciences, Materials Engineering, Materials Science +13