Parametric Resonance Amplification in a MEMGyroscope

Abstract

A feasibility analysis of using parametric amplification in order to improve the performance of a micromachined rate gyroscope is presented. The actuation is based on variable force actuators that depend on the force-time variation relation, thus the nonlinear Mathieu equation governs the driving motion. We demonstrated by numerical simulations that in a parametric amplified system with linear mechanical stiffness there exist a flattened region that can be used as the operation region of a 2-DOF microgyroscope. In this way the system is able to achieve a wider bandwidth of operation without sacrificing the sense mode gain: a robust micro sensor that is less sensitive to parameter variations