Sensors and Actuators A Physical · 2005 · 14 citations · 25 references
EngineeringManufacturing EngineeringMaterials EngineeringMicrofabricationOpticsBulk MicromachiningLens SystemsMems FabricationLens DesignLens Microstructure AnalysisMicro-lens ArraysMicroscale FabricationSoft Lens Geometry
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