Concepedia

Cubic paraelectric (nonferroelectric) perovskite PLT thin films with high permittivity for ULSI DRAMs and decoupling capacitors

IEEE Transactions on Electron Devices · 1992 · 78 citations · 18 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsThin FilmsDielectric CeramicsDielectricsPerovskite MaterialsSemiconductor Device MaterialsThin Film Electrical PropertiesThin-film MaterialsHigh-permittivity CeramicsHigh-permittivity MaterialsPermittivityPerovskite Dielectrics

Abstract

Polycrystalline paraelectric perovskite thin films in the Pb-La-Ti-O or PLT (28 mol.% La) system have been studied. Thin (0.5- mu m) films were integrated onto 3-in Pt/Ti/SiO/sub 2//

References

18

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Natural Sciences, Materials Engineering, Materials Science +14

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Natural Sciences, Materials Engineering, Materials Science +17

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Logan Parker, A.F. Tasch · IEEE Circuits and Devices Magazine · 1990 · 304 citations

Natural Sciences, Materials Engineering, Materials Science +17

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Engineering, Electrical Engineering, Materials Science +16

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Engineering, Computer Engineering, Electrical Engineering +17