Intensity Correction in Texture Measurement of Polycrystalline Thin Films by X‐Ray Diffraction

Abstract

The tilting of a specimen may not only result in defocusing effect, but also in a change of irradiated volume during texture measurement for thin films and coatings by using X‐ray diffraction. The influence on diffraction intensity has to be considered in order to obtain an accurate result of texture analysis. The effect of irradiated volume can be formulated as a function of the thickness and the linear absorption of a studied film material, the tilt angle of the specimen and the Bragg angle of diffraction, and then eliminated. In view of that the preparation of a randomly oriented specimen would be difficult, a simple and convenient method is hereby proposed to correct the defocusing effect from known data of existing bulk powder specimens with random orientation by interpolation (or extrapolation). The two correction methods were experimentally verified to be effective and reliable.