Internal electrical phase inversion for FF-beam resonator arrays and tuning fork filters

Abstract

This paper reports on a novel MEMS electrical phase inverter resonator filter driving using differential DC bias. The internal electrical phase inverter mechanism is demonstrated by a clamped-clamped (CC) beam resonator and wire coupled free-free (FF) beam resonator arrays with in-phase or differential DC-bias. The filter performance is then demonstrated by an anchor coupled double-ended tuning fork (DETF) resonator and is realized in a silicon microfabrication process. The filter bandwidth is voltage tunable employing the electrical spring softening effect and the minimum tunable bandwidth is set by the energy coupling between neighbouring modes.