On the modified Reynolds equation model for the prediction of squeeze-film gas damping in a low vacuum

Squeeze film air damping in MEMS

Minhang Bao, Heng Yang · Sensors and Actuators A Physical · 2007 · 693 citations

Engineering, Materials Science, Aerodynamics +10

Equivalent-circuit model of the squeezed gas film in a silicon accelerometer

Timo Veijola, Heikki Kuisma, Juha Lahdenperä et al. · Sensors and Actuators A Physical · 1995 · 463 citations

Engineering, Electrical Engineering, Physics +16

Second-order slip laws in microchannels for helium and nitrogen

J. R. Maurer, Patrick Tabeling, Pierre Joseph et al. · Physics of Fluids · 2003 · 337 citations

Engineering, Mechanical Engineering, Physics +17

A Database for Interpolation of Poiseuille Flow Rates for High Knudsen Number Lubrication Problems

Shigehisa Fukui, R. Kaneko · Journal of Tribology · 1990 · 316 citations

Engineering, Mechanical Engineering, Physics +16

Mass flow and tangential momentum accommodation in silicon micromachined channels

Errol B. Arkilic, Kenneth Breuer, Martin A. Schmidt · Journal of Fluid Mechanics · 2001 · 292 citations

Engineering, Mechanical Engineering, Physics +16