Concepedia

Publication | Closed Access

MEMS packaging process by film transfer using an anti-adhesive layer

DOI

23

Citations

22

References

2010

Year

Sebastien Brault, Olivier Garel, Guillaume Schelcher, N. Isac, Fabien Parrain, Alain Bosseboeuf, Fabrice Verjus, M. Desgeorges, Elisabeth Dufour‐Gergam
Microsystem Technologies

References

YearCitations

Page 1