Analytical Chemistry · 1997 · 533 citations · 17 references
EngineeringBioengineeringBiomedical EngineeringBiomemsMicroelectromechanical SystemsMicrofabricationMems FabricationMicrofluidic Device FabricationMicrofluidic DevicesMicrofluidic SystemsMicrofluidicsSoft LithographyElectrophoretic DetectionMicrochannel FabricationMicrochannel FlowMicrofluidic Diagnostic DevicesMicrofluidic FabricationMicrofluidic PatterningSilicon Wafer Processing
Microfluidic devices have been fabricated on poly(methyl methacrylate) substrates by two independent imprinting techniques. First-generation devices were fabricated using a small-diameter wire to create an impression in plastics softened by low-temperature heating. The resulting devices are limited to only simple linear channel designs but are readily produced at low cost. Second-generation devices with more complex microchannel arrangements were fabricated by imprinting the plastic substrates using an inverse three-dimensional image of the device micromachined on a silicon wafer. This micromachined template may be used repeatedly to generate devices reproducibly. Fluorescent analtyes were used to demonstrate reproducible electrophoretic injections. An immunoassay was also performed in an imprinted device as a demonstration of future applications.
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Wafer bonding for silicon-on-insulator technologies
J. B. Lasky · Applied Physics Letters · 1986 · 574 citations