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Publication | Open Access

Current Voltage Characteristics through Grains and Grain Boundaries of High-k Dielectric Thin Films Measured by Tunneling Atomic Force Microscopy

DOIFull Paper Access

18

Citations

0

References

2011

Year

K. Murakami, Mathias Rommel, V. Yanev, Anton J. Bauer, L. Frey, David G. Seiler, Alain C. Diebold, Robert McDonald, Amal Chabli, Erik M. Secula
AIP conference proceedings

Abstract

S.134-138