The preparation of transparent ZnO: Al thin films

Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

Tadatsugu Minami, Hidehito Nanto, Shinzo Takata · Japanese Journal of Applied Physics · 1984 · 548 citations

Natural Sciences, Materials Engineering, Materials Science +17

Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

Tadatsugu Minami, Hirotoshi Sato, Hidehito Nanto et al. · Japanese Journal of Applied Physics · 1985 · 546 citations

Natural Sciences, Materials Engineering, Materials Science +17

Highly conductive and transparent zinc oxide films prepared by rf magnetron sputtering under an applied external magnetic field

Tadatsugu Minami, Hidehito Nanto, S. Takata · Applied Physics Letters · 1982 · 190 citations

Natural Sciences, Materials Engineering, Materials Science +17

Facing targets type of sputtering method for deposition of magnetic metal films at low temperature and high rate

M. Naoe, S. Yamanaka, Y. Hoshi · IEEE Transactions on Magnetics · 1980 · 189 citations

Natural Sciences, Materials Engineering, Materials Science +15