Diffusion of copper in thin TiN films

Influence of dislocations on diffusion kinetics in solids with particular reference to the alkali halides

Lionel G. Harrison · Transactions of the Faraday Society · 1961 · 967 citations

Natural Sciences, Materials Science, Physics +15

Diffusion barriers in thin films

M.−A. Nicolet · Thin Solid Films · 1978 · 684 citations

Natural Sciences, Materials Engineering, Materials Science +10

The analysis of grain boundary diffusion measurements

A.D. Le Claire · British Journal of Applied Physics · 1963 · 622 citations

Engineering, Materials Engineering, Sediment Transport +12

TiN and TaN as diffusion barriers in metallizations to silicon semiconductor devices

M. Wittmer · Applied Physics Letters · 1980 · 137 citations

Engineering, Materials Engineering, Materials Science +17

Application of Ti: W barrier metallization for integrated circuits

P. B. Ghate, J.C. Blair, C.R. Fuller et al. · Thin Solid Films · 1978 · 112 citations

Engineering, Materials Engineering, Materials Science +11