Wafer-level hermetic packaged microaccelerometer with fully differential BiCMOS interface circuit

Micromachined inertial sensors

N. Yazdi, Farrokh Ayazi, K. Najafi · Proceedings of the IEEE · 1998 · 1.8K citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Mechanical-thermal noise in micromachined acoustic and vibration sensors

T. B. Gabrielson · IEEE Transactions on Electron Devices · 1993 · 737 citations · Full text

Engineering, Mechanical Engineering, Physics +17

A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics

M. Lemkin, Bernhard E. Boser · IEEE Journal of Solid-State Circuits · 1999 · 428 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A low-noise low-offset capacitive sensing amplifier for a 50-/spl mu/g//spl radic/Hz monolithic CMOS MEMS accelerometer

Jiangfeng Wu, Gary K. Fedder, L.R. Carley · IEEE Journal of Solid-State Circuits · 2004 · 318 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

Mechanical-thermal noise in MEMS gyroscopes

R.P. Leland · IEEE Sensors Journal · 2005 · 157 citations

Engineering, Mechanical Engineering, Physics +17