Precise frequency estimation in a microelectromechanical parametric resonator

Abstract

The authors report here on precise resonant frequency estimation using the nonlinear spectral features of parametric resonance. Demonstration of 100 parts per 109 frequency resolution at room temperature is accompanied by a technique to observe the phase trajectories of escape in bistable parametrically resonant systems. The system offers an expanded dynamic range over similar linear resonators. Precise frequency estimation has implications in resonant mass sensing.