Microlens fabrication using an etched glass master

The manufacture of microlenses by melting photoresist

Daniel Daly, Neil A. Davies · Measurement Science and Technology · 1990 · 243 citations

Natural Sciences, Materials Science, Physics +9

Development of a Deep Silicon Phase Fresnel Lens Using Gray-Scale Lithography and Deep Reactive Ion Etching

Brian Morgan, Christopher M. Waits, John Krizmanic et al. · Journal of Microelectromechanical Systems · 2004 · 136 citations · Full text

Engineering, Electrical Engineering, Materials Engineering +17

A microfluidic dye laser fabricated by nanoimprint lithography in a highly transparent and chemically resistant cyclo-olefin copolymer (COC)

Daniel Nilsson, S. Balslev, Anders Kristensen · Journal of Micromechanics and Microengineering · 2004 · 48 citations

Engineering, Materials Engineering, Materials Science +17