Depth distribution of disorder and cavities in high dose helium implanted silicon characterized by spectroscopic ellipsometry - Concepedia

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Depth distribution of disorder and cavities in high dose helium implanted silicon characterized by spectroscopic ellipsometry

10

Citations

10

References

2004

Year

P. Petrík, F. Cayrel, M. Fried, O. Polgár, T. Lohner, Laëtitia Vincent, Daniel Alquier, J. Gyulai

Thin Solid Films

High Dose HeliumPhysicsSpectroscopic EllipsometryApplied PhysicsSilicon On InsulatorSilicon DebuggingDepth Distribution

References

	Year	Citations

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