International Journal of Precision Engineering and Manufacturing · 2013 · 79 citations · 19 references
Materials ScienceRoom TemperatureElectrical EngineeringOptical MaterialsEngineeringIon-assisted DepositionOxide ElectronicsSurface ScienceApplied PhysicsIndium-tin OxideThin FilmsChemical DepositionOptoelectronicsChemical Vapor DepositionThin Film Processing
19