Concepedia

Micromachining of a silicon multichannel microprobe for neural electrical activity recording

Carmen Moldovan, V. Ilian, Ghe. Constantin, Rodica Iosub, M. Modreanu, I. Dinoiu, Bogdan Fîrtat, C. Voițincu

Sensors and Actuators A Physical · 2002 · 10 citations · 4 references

Concepts

EngineeringBioengineeringBiomedical EngineeringMicroelectromechanical SystemsMicrofabricationNeural EngineeringMicroelectrode ArraysMicrofabrication ProcessesMicrofluidic DevicesMicrofluidicsMicromachiningNeural Signal AcquisitionMicroelectromechanical System FabricationMultichannel Neural RecordingNeural RecordingNeural Recording SystemsSilicon Microchannels

References

4

A high-yield IC-compatible multichannel recording array

K. Najafi, K.D. Wise, T. Mochizuki · IEEE Transactions on Electron Devices · 1985 · 301 citations

Engineering, Bioengineering, Biomedical Engineering +17

Integration of multi-microelectrode and interface circuits by silicon planar and three-dimensional fabrication technology

Kouro Takahashi, Tadayuki Matsuo · Sensors and Actuators · 1984 · 47 citations

Engineering, Bioengineering, Biomedical Engineering +16

Anisotropic etching of silicon in a complexant redox alkaline system

Carmen Moldovan, Rodica Iosub, Dan Dascǎlu et al. · Sensors and Actuators B Chemical · 1999 · 38 citations

Engineering, Materials Engineering, Materials Science +12

A two-wire, digital output multichannel microprobe for recording single-unit neural activity

Eric Peeters, Willy Sansen, J. Gybels et al. · Sensors and Actuators B Chemical · 1991 · 16 citations

Engineering, Biomedical Engineering, Neuroscience +14