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Integration of multi-microelectrode and interface circuits by silicon planar and three-dimensional fabrication technology

3D Ic ArchitectureElectrical EngineeringInterface CircuitsEngineeringWafer Scale ProcessingFlexible ElectronicsMicrofabricationThree-dimensional Fabrication TechnologyDevice IntegrationBioelectronicsSilicon Planar3D PrintingElectronic PackagingMicroelectronics3D IntegrationInterconnect (Integrated Circuits)