Concepedia

Publication | Closed Access

Electrical characterization of CNT contacts with Cu Damascene top contact

DOI

29

Citations

14

References

2012

Year

Marleen H. van der Veen, Bart Vereecke, Cedric Huyghebaert, Daire Cott, Masahito Sugiura, Yusaku Kashiwagi, Lieve Teugels, Rudy Caluwaerts, Nicolò Chiodarelli, Philippe M. Vereecken,
Microelectronic Engineering

References

YearCitations

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