Concepedia

Masahito Sugiura

MS

Statistics

Publications

4

Citations

85

H-Index

4

Active since

1998

Affiliations

Tokyo Electron (Japan)(Current)

IMEC

Masahito Sugiura is an author at Tokyo Electron (Japan) specializing in engineering, materials science, and surface science.

Top concepts

EngineeringMaterial ScienceChemistryNanomaterialsApplied PhysicsNanoelectronicsSurface ScienceChemical EngineeringEnergyHydrogen

Publications per year

1998–2014

4

Publications

4

Electrical characterization of CNT contacts with Cu Damascene top contact

Marleen H. van der Veen, Bart Vereecke, Cedric Huyghebaert et al. · Microelectronic Engineering · 2012 · 29 citations

Materials Science, Electrical Engineering, Engineering +7

Electrochemical Deposition of Subnanometer Ni Films on TiN

Johannes Vanpaemel, Masahito Sugiura, Daniel Cuypers et al. · Langmuir · 2014 · 22 citations

Materials Science, Chemical Engineering, Engineering +13

Growth and integration challenges for carbon nanotube interconnects

Johannes Vanpaemel, Masahito Sugiura, Y. Barbarin et al. · Microelectronic Engineering · 2013 · 21 citations

Engineering, Carbon-based Material, Nanomaterials +7

Ethanol‐Addition‐Enhanced, Chemical Vapor Deposited Tantalum Oxide Films from Ta ( OC 2 H 5 ) 5 and Oxygen Precursors

H. Shinriki, Masahito Sugiura, Yijun Liu et al. · Journal of The Electrochemical Society · 1998 · 13 citations

H 5, Engineering, Oxygen Precursors +16

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