Masahito Sugiura - Concepedia

Author

Masahito Sugiura

Also Known As

Masahito SUGIURA, Masahito Sugiura

Publications

127

Citations

H-Index

Concepts

All Affiliations

Masahito Sugiura is an author at Tokyo Electron (Japan) specializing in engineering, materials science, and surface science.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	85
2	Applied Physics	2	2	50
3	Chemical Engineering	2	2	35
4	Chemistry	2	2	35
5	Electrical Engineering	1	1	29

Masahito Sugiura

Publications

Citations

H-Index

Page 1

	Year	Citations
Electrical characterization of CNT contacts with Cu Damascene top contact Marleen H. van der Veen, Bart Vereecke, Cedric Huyghebaert, Microelectronic Engineering Materials ScienceElectrical EngineeringEngineeringNanoelectronicsApplied Physics	2012	29
Electrochemical Deposition of Subnanometer Ni Films on TiN Johannes Vanpaemel, Masahito Sugiura, Daniel Cuypers, Langmuir Materials ScienceChemical EngineeringEngineeringNanomaterialsNanotechnology	2014	22
Growth and integration challenges for carbon nanotube interconnects Johannes Vanpaemel, Masahito Sugiura, Y. Barbarin, Microelectronic Engineering EngineeringCarbon-based MaterialNanomaterialsNanoelectronicsApplied Physics	2013	21
Ethanol‐Addition‐Enhanced, Chemical Vapor Deposited Tantalum Oxide Films from Ta ( OC 2 H 5 ) 5 and Oxygen Precursors H. Shinriki, Masahito Sugiura, Yijun Liu, Journal of The Electrochemical Society H 5EngineeringOxygen PrecursorsChemistryChemical Deposition	1998	13

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