Applied Surface Science · 2011 · 15 citations · 38 references
EngineeringMaterials EngineeringMaterials ScienceNanomaterialsNanotechnologySemiconductor MaterialsLaser PhysicsNanomaterials SynthesisNanoscale MaterialsSemiconductor NanomaterialsSilicon MaterialsUltrafast OpticsFemtosecond Laser PulsesLaser AblationMaterial AblationNanostructure CharacterizationUltrafast Laser ExcitationUltrafast Laser Material ProcessingUltrafast Laser Micromachining
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Laser-induced periodic surface structure. I. Theory
J. E. Sipe, Jeff F. Young, J. S. Prestón et al. · Physical review. B, Condensed matter · 1983 · 1.3K citations
Natural Sciences, Physics, Optics +16
Microstructuring of silicon with femtosecond laser pulses
Tsing-Hua Her, Richard Finlay, Claudia Wu et al. · Applied Physics Letters · 1998 · 807 citations
Femtosecond laser ablation of silicon–modification thresholds and morphology
Jörn Bonse, S. Baudach, Jörg Krüger et al. · Applied Physics A · 2002 · 807 citations