Semiconductor Surface Damage Produced by Ruby Lasers

Abstract

Semiconductor surface damage, produced by a focused beam of ruby laser light, consisted of regular patterns of cracks and a system of parallel straight lines. The system of grooves (spacing of about 0.0001 cm) can be explained on the basis of diffraction effects at the focus of a lens. The regular crack patterns were related to the cleavage habits of the semiconductors by x-ray analysis. (Author)