Publication | Closed Access
Laser-induced metal deposition on semiconductors from liquid electrolytes
39
Citations
9
References
1989
Year
EngineeringSemiconductor PhysicsChemical DepositionMaskless DepositionSemiconductor NanostructuresSemiconductorsPulsed Laser DepositionCompound SemiconductorMaterials ScienceSemiconductor TechnologyElectrical EngineeringThermal EmfSemiconductor MaterialLaser-assisted DepositionMicroelectronicsDeposition MechanismSurface ScienceApplied PhysicsLaser-induced Metal Deposition
Maskless deposition of gold and copper from electrolyte solutions onto n-doped semiconductors (GaAs, Si) is investigated. The metal deposits are found to have lateral dimensions of about 1 μm and are in barrier contact with the semiconductor. The proposed deposition mechanism is governed by the electric fields resulting from the Dember effect, the p-n junction, and the thermal emf.
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