Laser enhanced electroplating and maskless pattern generation

Abstract

Maskless plating has been achieved through a new technique that utilizes a cw or pulsed laser, focused onto an electrode in an electroplating bath. In the region of optical absorption on the cathode, plating enhancement rates on the order of 103 occur for optical power densities on the order of 104 W/cm2. Laser scanning produces a plating pattern along the scanning path. A qualitative theory based on convective mass transport is used to explain the results.