Low-temperature growth of ZnO nanorods in anodic aluminum oxide on Si substrate by atomic layer deposition

Abstract

Low-temperature growth of self-organized ZnO nanorods on Si substrate is achieved using anodic aluminum oxide and atomic layer deposition at 250°C without catalyst or seed layer. Photoluminescence spectrum indicates that the ZnO nanorod arrays exhibit a blue∕green luminescence at 480nm. In addition, the nanorod arrays demonstrate excellent field-emission properties with a turn-on electric field of 6.5Vμm−1 and a threshold electric field of 9.8Vμm−1, which are attributed to the perfectly perpendicular alignment of ZnO nanorods to the Si substrate.