Journal of Materials Processing Technology · 2001 · 80 citations · 3 references
EngineeringManufacturing EngineeringMaterials EngineeringElectrochemistryMicroelectromechanical SystemsMicrofabricationElectrochemical CellsElectrolysis ProcessesMachiningMems FabricationMicrofabrication ProcessesMicromachiningElectrochemical MicromachiningManufacturingMicroelectromechanical System FabricationMicroreactorsMicroscale Fabrication
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