Surface and Coatings Technology · 1998 · 26 citations · 18 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsSemiconductor Crystal GrowthSemiconductor Device MaterialsSemiconductor PhysicsSemiconductor Thin FilmsThin-film DepositionWide-bandgap SemiconductorsFilm Growth MechanismsGallium NitrideReactive SputteringSputteringThin-film Growth Mechanisms
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