Contact and interconnect formation on compound semiconductor devices by ionized-cluster beam deposition

Ohmic Contacts to Solution-Grown Gallium Arsenide

J. S. Harris, Yasuo Nannichi, G. L. Pearson et al. · Journal of Applied Physics · 1969 · 116 citations

Engineering, Electrical Engineering, Materials Science +17

Ionized-cluster beam deposition

Toshiyuki Takagi, Ichiro Yamada, Akio Sasaki · Journal of Vacuum Science and Technology · 1975 · 112 citations

Natural Sciences, Materials Engineering, Materials Science +8

Electrical and Electroluminescent Properties of Gallium Phosphide Diffused<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mi>p</mml:mi><mml:mo>−</mml:mo><mml:mi>n</mml:mi></mml:math>Junctions

M. Gershenzon, R. A. Logan, D. F. Nelson · Physical Review · 1966 · 77 citations

Engineering, Materials Engineering, Materials Science +17

Variation of Contact Resistance of Metal-GaAs Contacts with Impurity Concentration and Its Device Implication

K.L. Klohn, L. Wandinger · Journal of The Electrochemical Society · 1969 · 34 citations

Engineering, Electrical Engineering, Materials Science +17