Effect of the stoichiometry of Si-rich silicon nitride thin films on their photoluminescence and structural properties

T.V. Torchynska, J.L. Casas Espínola, Erasto Vergara Hernández, L. Khomenkova, F. Delachat, A. Slaoui

Thin Solid Films · 2014 · 34 citations · 38 references

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