Synthesis of Poly[<i>N</i>-(1-adamantyl)vinylsulfonamide-<i>c</i><i>o</i>- 2-(2-methyl)adamantyl methacrylate] for 193 nm Lithography

Abstract

ADVERTISEMENT RETURN TO ISSUECommunication to the...Communication to the EditorNEXTSynthesis of Poly[N-(1-adamantyl)vinylsulfonamide-co- 2-(2-methyl)adamantyl methacrylate] for 193 nm LithographyToshiaki Fukuhara, Yuji Shibasaki, Shinji Ando, Shinji Kishimura, Masayuki Endo, Masaru Sasago, and Mitsuru UedaView Author Information Department of Organic and Polymeric Materials, Graduate School of Science and Engineering, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo, 152-8552, Japan, and ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electric Industrial Co., Ltd., 19, Nishikujo-Kasuga-cho, Minami, Kyoto 601-8413, Japan Cite this: Macromolecules 2005, 38, 8, 3041–3043Publication Date (Web):March 25, 2005Publication History Received28 October 2004Revised10 March 2005Published online25 March 2005Published inissue 1 April 2005https://pubs.acs.org/doi/10.1021/ma0477798https://doi.org/10.1021/ma0477798rapid-communicationACS PublicationsCopyright © 2005 American Chemical SocietyRequest reuse permissionsArticle Views523Altmetric-Citations10LEARN ABOUT THESE METRICSArticle Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated. Share Add toView InAdd Full Text with ReferenceAdd Description ExportRISCitationCitation and abstractCitation and referencesMore Options Share onFacebookTwitterWechatLinked InRedditEmail Other access optionsGet e-AlertscloseSupporting Info (1)»Supporting Information Supporting Information SUBJECTS:Copolymers,Dissolution,Optical properties,Reaction products,Surface interactions Get e-Alerts