MEMS Fabry–Pérot optical accelerometer employing mechanical amplification via a V-beam structure - Concepedia

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MEMS Fabry–Pérot optical accelerometer employing mechanical amplification via a V-beam structure

46

Citations

22

References

2013

Year

Edward Davies, David Solomon George, M. C. Gower, Andrew S. Holmes

Sensors and Actuators A Physical

Sensor TechnologyEngineeringMicrofabricationAccelerometerMicroelectromechanical SystemsV-beam StructureInstrumentationMicro-optical ComponentOptical SensorsMicro-electromechanical SystemMechanical Amplification

References

	Year	Citations

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