MEMS Fabry–Pérot optical accelerometer employing mechanical amplification via a V-beam structure

Experimental demonstration of a fiber Bragg grating accelerometer

Timothy A. Berkoff, A.D. Kersey · IEEE Photonics Technology Letters · 1996 · 204 citations

Engineering, Electrical Engineering, Instrumentation +15

Design of Compliant Mechanisms: Applications to MEMS

Sridhar Kota, Jinyong Joo, Zhe Li et al. · Analog Integrated Circuits and Signal Processing · 2001 · 186 citations · Full text

Engineering, Mechanical Engineering, Mechatronics Engineering +12

In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor

Uma Krishnamoorthy, Roy H. Olsson, Gregory R. Bogart et al. · Sensors and Actuators A Physical · 2008 · 172 citations

Engineering, Materials Science, Mechatronics Engineering +14

Two-Axis Temperature-Insensitive Accelerometer Based on Multicore Fiber Bragg Gratings

Amanda Fender, William N. MacPherson, Robert R. J. Maier et al. · IEEE Sensors Journal · 2008 · 116 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

SU-8 Optical Accelerometers

Andreu Llobera, V. Seidemann, J.A. Plaza et al. · Journal of Microelectromechanical Systems · 2007 · 57 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17