Effect of H2 dilution on the surface composition of plasma-deposited silicon films from SiH4

<i>Internal Reflection Spectroscopy</i>

N. J. Harrick, Joseph G. Hoffman · Physics Today · 1968 · 1.7K citations

Natural Sciences, Physics, Optics +15

Surface infrared spectroscopy

Yves J. Chabal · Surface Science Reports · 1988 · 903 citations

Formation kinetics and control of microcrystallite in μc-Si:H from glow discharge plasma

Akihisa Matsuda · Journal of Non-Crystalline Solids · 1983 · 646 citations

Natural Sciences, Materials Engineering, Materials Science +14

Internal Reflection Spectroscopy. Theory and applications

Analytica Chimica Acta · 1993 · 265 citations

Natural Sciences, Chemistry, Materials Science +12

Plasma deposition of hydrogenated amorphous silicon: Studies of the growth surface

John R. Abelson · Applied Physics A · 1993 · 110 citations

Natural Sciences, Materials Science, Physics +16