Erik A. Edelberg - Concepedia

Author

Erik A. Edelberg

University of California, Santa Barbara

Also Known As

E. Edelberg, Erik A Edelberg, Erik A. Edelberg, Erik Edelberg

Publications

875

Citations

H-Index

Concepts

All Affiliations

University of California, Santa Barbara Lam Research (United States)

About

Erik A. Edelberg is an author at University of California, Santa Barbara specializing in engineering, applied physics, and surface science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	11	11	875
2	Applied Physics	8	8	708
3	Chemistry	3	3	335
4	Chemical Engineering	2	2	164
5	Education	1	1	50

Erik A. Edelberg

Publications

875

Citations

H-Index

Page 1

	Year	Citations
Modeling of the sheath and the energy distribution of ions bombarding rf-biased substrates in high density plasma reactors and comparison to experimental measurements Erik A. Edelberg, Eray S. Aydil Journal of Applied Physics Rf-biased SubstratesEngineeringSheath ProfilesPlasma SciencePlasma Physics	1999	142
Silicon hydride composition of plasma-deposited hydrogenated amorphous and nanocrystalline silicon films and surfaces Denise C. Marra, Erik A. Edelberg, R.L. Naone, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringChemistrySilicon On InsulatorPlasma ProcessingSemiconductors	1998	132
Effect of chamber wall conditions on Cl and Cl2 concentrations in an inductively coupled plasma reactor Saurabh J. Ullal, Anna R. Godfrey, Erik A. Edelberg, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials ScienceOptical MaterialsEngineeringOptical DiagnosticsNonthermal Plasma	2002	116
Modeling of SiO2 deposition in high density plasma reactors and comparisons of model predictions with experimental measurements Ellen Meeks, Richard A. Larson, Pauline Ho, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringIntegrated Circuit ManufacturingPlasma PhysicsChemistryChemical Deposition	1998	114
Luminescence from plasma deposited silicon films Erik A. Edelberg, Sam Bergh, R.L. Naone, Journal of Applied Physics EngineeringOptoelectronic DevicesChemistrySilicon On InsulatorLuminescence Property	1997	89
Energy distribution of ions bombarding biased electrodes in high density plasma reactors Erik A. Edelberg, Andrew Perry, Neil Benjamin, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Electrical EngineeringEngineeringRadio FrequencyEnergy DistributionPlasma Science	1999	87
Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces Erik A. Edelberg, Andrew Perry, Neil Benjamin, Review of Scientific Instruments EngineeringPlasma SciencePlasma PhysicsIon Beam InstrumentationEnergy Distributions	1999	52
New diagnostic method for monitoring plasma reactor walls: Multiple total internal reflection Fourier transform infrared surface probe Anna R. Godfrey, Saurabh J. Ullal, L. B. Braly, Review of Scientific Instruments Reactor WallsEngineeringMeasurementEducationPlasma Processing	2001	50
Visible luminescence from nanocrystalline silicon films produced by plasma enhanced chemical vapor deposition Erik A. Edelberg, Sam Bergh, R.L. Naone, Applied Physics Letters Optical MaterialsEngineeringSemiconductor MaterialsOptoelectronic DevicesSilicon On Insulator	1996	47
Profile simulation of high aspect ratio contact etch Doosik Kim, Eric A. Hudson, David Cooperberg, Thin Solid Films EngineeringMechanicsContact MechanicMechanical EngineeringNumerical Simulation	2006	28

Page 1