Erik A. Edelberg

Modeling of the sheath and the energy distribution of ions bombarding rf-biased substrates in high density plasma reactors and comparison to experimental measurements

Erik A. Edelberg, Eray S. Aydil · Journal of Applied Physics · 1999 · 142 citations

Rf-biased Substrates, Engineering, Sheath Profiles +18

Silicon hydride composition of plasma-deposited hydrogenated amorphous and nanocrystalline silicon films and surfaces

Denise C. Marra, Erik A. Edelberg, R.L. Naone et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 132 citations

Engineering, Chemistry, Silicon On Insulator +20

Effect of chamber wall conditions on Cl and Cl2 concentrations in an inductively coupled plasma reactor

Saurabh J. Ullal, Anna R. Godfrey, Erik A. Edelberg et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 116 citations

Materials Science, Optical Materials, Engineering +15

Modeling of SiO2 deposition in high density plasma reactors and comparisons of model predictions with experimental measurements

Ellen Meeks, Richard A. Larson, Pauline Ho et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 114 citations

Engineering, Integrated Circuit Manufacturing, Plasma Physics +20

Luminescence from plasma deposited silicon films

Erik A. Edelberg, Sam Bergh, R.L. Naone et al. · Journal of Applied Physics · 1997 · 89 citations

Engineering, Optoelectronic Devices, Chemistry +19