Saurabh J. Ullal

Statistics

Publications

Citations

421

H-Index

Active since

2001

Affiliations

University of California, Santa Barbara(Current)

Lam Research (United States)

Saurabh J. Ullal is an author at University of California, Santa Barbara specializing in natural sciences, plasma-surface interactions, and plasma etching.

Publications per year

2001–2015

Publications

Effect of chamber wall conditions on Cl and Cl2 concentrations in an inductively coupled plasma reactor

Saurabh J. Ullal, Anna R. Godfrey, Erik A. Edelberg et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 118 citations

Natural Sciences, Materials Science, Physics +17

Maintaining reproducible plasma reactor wall conditions: SF6 plasma cleaning of films deposited on chamber walls during Cl2/O2 plasma etching of Si

Saurabh J. Ullal, Harmeet Singh, J. E. Daugherty et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 80 citations

Natural Sciences, Materials Science, Physics +17

World׳s largest sapphire for many applications

C. P. Khattak, Raj Shetty, C. R. Schwerdtfeger et al. · Journal of Crystal Growth · 2015 · 60 citations

Engineering, Computer Systems, Photonics +3

New diagnostic method for monitoring plasma reactor walls: Multiple total internal reflection Fourier transform infrared surface probe

Anna R. Godfrey, Saurabh J. Ullal, L. B. Braly et al. · Review of Scientific Instruments · 2001 · 50 citations

Natural Sciences, Materials Science, Physics +17

Deposition of silicon oxychloride films on chamber walls during Cl2/O2 plasma etching of Si

Saurabh J. Ullal, Harmeet Singh, Vahid Vahedi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 48 citations

Natural Sciences, Materials Engineering, Materials Science +17

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